VESCO-Ultima 310 MBE SYSTEM
EFFUSION CELLS are the most vital components in an MBE system. They have considerable impact on the quality of the grown layer, such as surface morphology, thickness and composition uniformity, and film purity. System efficiency is greatly affected by effusion cells, regarding throughput and machine run time. VESCO-NM manufactures different sizes of effusion cells for various sources and purposes from low-temperature to high-temperature applications. Our effusion cells are compatible with different MBE systems and can be installed in various orientations in MBE systems. VESCO-NM effusion cells are also easy to rebuild and to maintain.
Key Features:
- Suitable for various materials
- Compatible with all MBE systems
- Unique thermocouple design
- Low power consumption
- Highest reliability
- Integrated standoffs
- Fast and easy filling process
- Water cooling coil (optional)
- Friendly operation and maintenance
- Competitive price
- Short lead time
Unique in design and construction to achieve unparalleled reliability and stability
Low Temperature Effusion Cells
Low Temperature Effusion Cells are manufactured for the evaporation of materials with high vapor pressure, such as organic materials, As, Ba, Bi, Ca, CdSe, K, Li, Mg, Sb, etc. These materials evaporate at temperatures below 1000°C. Low temperature effusion cells require precise control of temperature and reproducibility.
Key Features:
- Compatible for all MBE systems
- Evaporation temperature range: 80 °C – 1000 °C
- PBN crucibles for materials and compounds (other upon request)
- Quartz crucibles for organic materials (other upon request)
- Type K thermocouple
- Crucibles sizes are from 2 to 200 cm³
- Tantalum-thick-wire heater for high temperature uniformity and reliability
- Excellent temperature stability and controllability
- Optional: Integrated water cooling shroud and shutter
- Optional: Integrated standoffs for quick and easy filling
- Extremely stable flux rates
Technical Data
| Technical Data: | |
|---|---|
| Mounting flange | 2.75” CF flange (other upon request) |
| Heater | Tantalum wire 0.040” OD |
| Temperature range | 100 °C – 1000 °C |
| Temperature stability | ± 0.1°C |
| Crucible type | PBN, Al2O3, Quartz (other upon request) |
| Crucibles volume | 2-200 cc (as required) |
| Evaporated materials | High vapor pressure and organic materials |
| Thermocouple type | Type K |
| Outgassing temperature | 1100 °C |
| In-vacuum dimensions | 12” long, 1.4”OD (other on request) |
| Bakeout temperature | 250o C |
Standard Effusion Cells
Standard Effusion Cells are used for evaporation or sublimation of a variety of elements and compounds, such as Ga, Al, In, Cu, Ag, Au, CaF etc, in the temperature range from 500°C up to 1300°C. VESCO-NM design and manufacture different types of standard effusion cells; single filament, hot lip filament, cold lip filament, and dual filament heaters for different applications and evaporation materials. All heaters are constructed from tantalum wires and PBN rings for support. Tantalum wire heaters are preferred over tantalum foil heaters, because they provide better temperature uniformity around the crucible and are more reliable and stabile with much longer lifetime.
Key Features:
- Compatible for all MBE systems
- Evaporation temperature range 500 °C – 1300 °C
- PBN, PG, refractory metal, and Al2O3 are available upon request
- Type C thermocouple
- Crucibles sizes are from 2 to 400 cm³
- Tantalum-thick-wire heater for high temperature uniformity and reliability
- Excellent temperature stability and controllability
- Optional: Integrated water cooling shroud and shutter
- Optional: Integrated standoffs for quick and easy filling
- Excellent stable flux rates
- High outgassing temperatures
Technical Data
| Technical Data: | |
|---|---|
| Mounting flange | 2.75” CF flange (other upon request) |
| Heater | Tantalum wire 0.040” OD |
| Temperature range | 100 °C – 1000 °C |
| Temperature stability | ± 0.1°C |
| Crucible type | PBN, Al2O3, Quartz (other upon request) |
| Crucibles volume | 2-200 cc (as required) |
| Evaporated materials | High vapor pressure and organic materials |
| Thermocouple type | Type K |
| Outgassing temperature | 1100 °C |
| In-vacuum dimensions | 12” long, 1.4”OD (other on request) |
| Bakeout temperature | 250o C |
Testing and Results:
Doping Effusion Cells
VESCO-NM doping effusion cells are designed for evaporation or sublimation of elemental and compound materials, such as Si, Be, and GaTe, in the temperature range from 200°C to 1350°C. Effusion cells heaters are fabricated using 0.040” OD thick tantalum wire with PBN supporting rings; therefore they have excellent temperature uniformity and high reliability. Effusion cells with conical shaped crucibles and different materials (PBN, PG, and Al 2 O 3) are available. We also supply dual dopant cluster sources if two or more dopant materials are in need.
Key Features:
- Compatible with all MBE machines
- Low quantities of the doping materials
- Small size crucibles (2-25 CC)
- Compact size
- Low flux rate
- Wide angle flux distribution (conical shape crucible)
- Excellent doping uniformities
- Most reliable and effective with 0.040” OD Ta-wire heater
- Long lifetime
- Low power consumption
- Optional: Integrated water cooling, standoffs, and shutter
Technical Data
| Technical Data: | |
|---|---|
| Mounting Flange | 2.75” and 4.5” (other upon request) |
| Crucible size | 2-25 CC |
| In-vacuum dimensions | 12” long and 2.4” OD (other upon request) |
| Heater types | Ta wire, 0.04” OD, single, hot lip, cold lip, and dual heater |
| Thermocouple | Type C |
| Operating temperature | 200-1340o C |
| Outgassing temperature | 1450o C |
| Bakeout temperature | 250o C |
| Option | Integrated water cooling. Standoffs, shutter |
Testing and Results:
High Temperature Effusion Cell
High temperature effusion cells are designed for evaporation or sublimation of low vapor pressure materials such as Fe, Cr, Ni, Co, Au, Ge etc in the temperature range of 1500o C-2000oC. Typical applications are the growth of magnetic or oxide thin films and surface analysis deposition. The heater element of these cells is fabricated using self-supporting thick tungsten coils or wires. Tungsten or tantalum shields are used to confine the heater inside the crucible. No ceramic or PBN insulation parts are directly used inside the hot zone. Different crucible materials are available such as Al2O3 , BeO, Ta, and W. The maximum operating temperature of the cell is limited by the crucible materials e.g. to 1550°C for PBN and 1800oC for PG. Reactions between crucible materials and evaporation materials play another factor to reduce the maximum allowable temperature.
Key Features:
- Compatible with all MBE machines
- Low quantities of deposition materials
- Small size crucibles (5-10 CC)
- Compact size cell
- Free-standing thick tungsten wires or coils
- High reliability and long life time
- Operating temperature up to 2000o C
- Low power consumption
- Optional: Integrated water cooling, standoffs, and shutter
